Download CMOS Hotplate Chemical Microsensors by Dr. Markus Graf, Dr. Diego Barrettino, Prof. Dr. Henry P. PDF

By Dr. Markus Graf, Dr. Diego Barrettino, Prof. Dr. Henry P. Baltes, Prof. Dr. Andreas Hierlemann (auth.)

This is the 1st finished booklet on microhotplate-based chemical sensor structures in CMOS-technology. It covers all features of profitable sensor prototyping: idea of transducer modelling, microelectronics layout issues, approach layout matters, and concerns concerning approach and machine microfabrication, packaging, and checking out. numerous varied hotplates for various operation stipulations is designated and a kinfolk of metal-oxide-covered microhotplate-based microsensor platforms with expanding complexity is gifted. those platforms belong to a brand new iteration of chemical microsensors and symbolize examples of the winning integration of nanomaterials, microtechnology and microelectronics.

The booklet offers scholars, scientists and engineers with an available creation to the sector of microhotplate-based chemical sensing, with all of the invaluable basic wisdom integrated. past that, it additionally offers targeted details on all very important matters touching on advanced high-performance CMOS chemical microsensor platforms; consequently it is going to even be important to specialists already acquainted with the field.

Show description

Read Online or Download CMOS Hotplate Chemical Microsensors PDF

Best chemical books

Membrane Handbook

Membrane tactics have broad business ap­ This instruction manual experiences the broadcast litera­ plications masking many current and rising ture, provides an in-depth description of com­ makes use of within the chemical, petrochemical, petroleum, mercialized membrane strategies, and provides a cutting-edge assessment of recent membrane seasoned­ environmental, water therapy, pharmaceutic­ al, scientific, nutrition, dairy, beverage, paper, tex­ cess techniques less than improvement.

Nonlinear Laser Chemistry: Multiple-Photon Excitation

Prefaces are typically written while a manuscript is done. Having comprehensive this ebook i will be able to truly see many shortcomings in it. but when i started to get rid of them i'd most likely write particularly a special ebook in one other years; certainly, this has already occurred as soon as. In 1979, whilst i ended the 1st model of this e-book, it used to be a lot broader in scope and used to be to be titled "Laser Photochemistry.

Chemical Carcinogenesis

In the course of October 18-30, 1981, the second one process the overseas tuition of natural and utilized Biostructure, a NATO complex learn Institute, was once held on the Ettore Majorana middle for medical tradition in Erice, Italy, co-sponsored via the overseas Union opposed to melanoma, the Italian League opposed to melanoma, the Italian Ministry of Public schooling, the Italian Ministry of medical and Technological study, the North Atlantic Treaty association, the Italian nationwide learn Council, the Sicilian nearby govt and pharmaceutical businesses (Zambeletti and Farmitalia).

Extra resources for CMOS Hotplate Chemical Microsensors

Example text

Mixed-frequency deposition of the nitride is one possibility to adjust the stress in the deposited layer [122].  kHz) plasma can be varied during the process. For the layer used here 95% high-frequency deposition time was chosen (Fig. The stress was measured on wafer-level with a thin-film stress analyzer. The stress value was determined by recording the curvature of the wafer after thin-film deposition. A tensile stress of   MPa was measured for the layer. Fig. 15. 4 Microhotplate with MOS-Transistor Heater 49 After the deposition of the passivation, the contact electrodes for the resistive measurements have to be opened (Fig.

A homogeneous temperature distribution in the heated area is highly desirable to make sure that all sensing processes on the hotplate take place at the same defined and precisely controlled temperature. – A high thermal resistance is needed to achieve minimum power consumption.  V. In view of the above considerations, a circular design of the heated area (300 µm diameter) on a square dielectric membrane (  µm ) was chosen, which is shown in Fig. 1. 1. A considerable part of the heat is usually dissipated through the metal supply lines to the bulk.

The annealing temperature range can be extended up to  C by using the hotplate annealing heater. 3 Physical Microhotplate Characterization For thermal characterization and temperature sensor calibration a microhotplate was fabricated, which is identical to that on the monolithic sensor chips, but does not include any electronics. The functional elements of this microhotplate are connected to bonding pads and not wired up to any circuitry, so that the direct access to the hotplate components without electronics interference is ensured.

Download PDF sample

Rated 4.49 of 5 – based on 15 votes